The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 1999
Filed:
Aug. 05, 1997
Applicant:
Inventors:
Steve Montesanto, San Jose, CA (US);
Gershon Perelman, Cupertino, CA (US);
Rudolf Brunner, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Corporation, San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K / ;
U.S. Cl.
CPC ...
382149 ; 382210 ; 250347 ; 25039009 ; 378145 ; 378154 ; 378155 ;
Abstract
The present invention resides in a Fourier filter to detect defects on semiconductor wafers. The present invention relates to a Fourier filter to detect defects on semiconductor wafers which is less susceptible to having the filter output affected by vibrations and which avoids the physical contact from conventional damping.