The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1999
Filed:
Jul. 03, 1997
Christopher P Grudzien, Mansfield, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A pressure sensor has a housing for receiving a fluid whose pressure is being sensed, and an electrode assembly and a diaphragm arranged to form a variable capacitor within the housing. In one embodiment, the electrode assembly includes a dielectric disk with a conductive electrode and a standoff being formed on a surface of the disk facing the diaphragm. A spacer ring is provided between the standoff and the diaphragm so that the thickness of the spacer ring sets the gap between the electrode of the electrode assembly and the diaphragm. In another embodiment, the electrode assembly is an integral unit that includes a housing and an electrode such that lower surfaces of the housing and the electrode are coplanar to each other. In this embodiment, the spacer is between the housing and the diaphragm such that the thickness of the ring sets the length of the gap.