The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 12, 1999
Filed:
Oct. 24, 1997
Applicant:
Inventors:
Werner Blersch, Bussmannshausen, DE;
Peter Gruenwald, Schelklingen, DE;
Michael Maurer, Ulm, DE;
Helmut Merkle, Tomerdingen, DE;
Thomas Theiler, Ulm, DE;
Heinrich Walk, Allmendingen, DE;
Assignee:
Steag AST, Dornstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
219390 ; 118730 ; 392418 ;
Abstract
A rapid thermal processing (RTP) chamber, wherein one wall of the chamber supporting a substrate rotates with respect to the rest of the chamber so that the substrate being treated in the RTP chamber is relatively rotated with respect to the lamps heating the substrate.