The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 05, 1999
Filed:
Mar. 25, 1998
Applicant:
Inventors:
Masayuki Hasegawa, Annaka, JP;
Kazuo Ogiwara, Annaka, JP;
Hiroyuki Kobayashi, Annaka, JP;
Yukinori Satoh, Annaka, JP;
Yoshihiro Shirata, Annaka, JP;
Masaaki Furuya, Annaka, JP;
Assignee:
Shin-Etsu Chemical Col., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D / ;
U.S. Cl.
CPC ...
95230 ; 95233 ; 95237 ; 423240 ; 4232452 ;
Abstract
A silane-containing gas is treated by contacting it with a liquid containing silanes or disilanes which are higher boiling than the silanes in the silane-containing gas, thereby easily removing or reducing the amount of silanes in the gas and enabling the recovery of these silanes.