The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 28, 1999

Filed:

Aug. 04, 1997
Applicant:
Inventors:

Norihiro Tokuyama, Kasaoka, JP;

Toshinori Ohmi, Higashiosaka, JP;

Alberto Oscar Adan, Ikoma, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
257345 ; 257409 ; 438290 ; 438298 ;
Abstract

After a field oxide film is formed on a P-type semiconductor substrate, ion implantation of boron is carried out with respect to a whole surface of the substrate so that a channel stopper layer is formed. Then, a MOS FET is formed in an active region of the semiconductor substrate. Subsequently, ion implantation of phosphorus is carried out, by using a gate electrode of the MOS FET and the field oxide film as a mask, so that impurity layers which have the same type of conductivity as that of the channel stopper layer and has a concentration lower than that of the channel stopper layer are formed right under the source/drain regions of the MOS FET between the source/drain regions and the channel stopper layer.


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