The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 28, 1999
Filed:
Nov. 26, 1996
Applicant:
Inventors:
Brian L Mueller, Aurora, IL (US);
Christopher C Streinz, Aurora, IL (US);
Steven K Grumbine, Aurora, IL (US);
Assignee:
Cabot Corporation, Boston, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K / ;
U.S. Cl.
CPC ...
2521861 ; 216 53 ; 2521821 ; 25218232 ; 2521834 ; 510175 ;
Abstract
A chemical mechanical polishing composition comprising an oxidizing agent and at least one catalyst having multiple oxidation states, the composition being useful when combined with an abrasive or with an abrasive pad to remove metal layers from a substrate.