The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 21, 1999
Filed:
Apr. 12, 1996
Michel Leroy, Saint-Egreve, FR;
Jean Muller, Voiron, FR;
Aluminium Pechiney, Courbevoie, FR;
Abstract
A process using ultrasonic inspection for testing the internal soundness of cathode sputtering targets, whose active part is made of aluminum with a very high degree of purity or a very pure aluminum alloy, consisting, after selection of an ultrasound sensor functioning at an operating frequency greater than 5 MHz, preferably between 10 and 50 MHz, and adjusting the appropriate measurement sequence, using a target immersed in a liquid and which has ceratin artificial defects simulating decohesions in the target, taking a count in terms of size and number of the internal decohesions per unit volume and selecting, for the applications requiring a very high degree of etching fineness, the targets with a decohesion density of .ltoreq.0.1 decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target, and cathode sputtering targets selected according to the process having no more than 0.1 internal decohesion larger than 0.1 mm/cm.sup.3 of active metal of the target.