The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 14, 1999

Filed:

Feb. 26, 1998
Applicant:
Inventors:

Kenzo Hanawa, Saitama, JP;

Naoyoshi Mochizuki, Saitama, JP;

Naruo Ueda, Saitama, JP;

Kazuhiko Kato, Saitama, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G / ; C09K / ; C01R / ; H01L / ;
U.S. Cl.
CPC ...
51309 ; 51307 ; 51308 ; 438693 ;
Abstract

A fine particulate polishing agent comprises fine particles of a solid solution composed of single-crystal ceric oxide and silicon dioxide and fine particles of silicon dioxide. A slurry polishing agent comprising the fine particulate polishing agent can be prepared by a method which comprises the steps of mixing, with stirring, single-crystal ceric oxide fine particles, silica sol and a liquid; drying the mixture; subjecting the dried particulate material to a thermal treatment at a high temperature and then cooling the solid solution powder formed by the thermal treatment and composed of single crystal ceric oxide and silicon dioxide; again mixing the powder with silica sol and a liquid; and then subjecting the mixture to deagglomeration using a wet pulverizing mill to give a slurry.


Find Patent Forward Citations

Loading…