The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 31, 1999
Filed:
Oct. 24, 1997
Applicant:
Inventors:
Atsuro Eitoku, Shiga-ken, JP;
Takao Kunihiro, Shiga-ken, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A46B / ;
U.S. Cl.
CPC ...
15 77 ; 15 882 ; 15 883 ; 15102 ;
Abstract
A substrate processing apparatus adapted to properly perform a substrate scrubbing process with the use of a scrubbing member. The apparatus includes a retention member for retaining a scrubbing member for scrubbing a substrate and a vertical drive mechanism for vertically moving the retention member. The state of the scrubbing member and the vertical position of the retention member are sensed, and a vertical position of the retention member suitable for the scrubbing of the substrate is determined on the basis of the results of the sensing. Then, the retention member is moved to the position thus determined.