The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Apr. 30, 1997
Applicant:
Inventor:
Ronald A Warren, Essex Junction, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438514 ; 438919 ;
Abstract
The life of a source filament in an ion implantation tool is extended by providing in the ion implantation tool both an ion source reactant gas for providing a source of ion species to be implanted and a counteracting gas to counter the chemical transport from or to the filament, depending upon the reaction that occurs between the ion source gas ions and the source filament.