The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 17, 1999
Filed:
Dec. 18, 1997
Wan-Li Cheng, Hsinchu, TW;
Vanguard International Semiconductor Corporation, Hsinchu, TW;
Abstract
The present invention includes an apparatus having a container (30) for storing liquid and holding a semiconductor wafer (32). The apparatus also includes a transducer (36) and a sonic generator (34). The transducer is attached to the container to transfer megasonic waves generated by the sonic generator into the container. A drain (38) releases the liquid from the container. At least one outlet opening (40) is set at the bottom of the container. Liquid inlets (42) provide the liquid to the container. Nozzles (44), connected to the liquid inlets, spray the liquid on the surface of the wafer. A liquid supply element (46) provides liquid to the container. Drive means (54), connected to the outlet opening of the container, circulates the liquid. A filter (56) is connected between the drive means and the liquid supply element to filter out residue in the liquid.