The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 1999
Filed:
Jul. 24, 1997
Paul S Thompson, Santee, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
Disclosed are techniques and apparatus for flexibly mounting a mechanism. The embodiments describe a flexible mount that is at once tolerant of misalignment, shock resistant, insensitive to rotational orientation, compact, and failure resistant. A mechanism is rigidly attached to a retainer that interlocks with a stationary housing and confines and compresses annular resilient members. The methods may in particular apply to the mounting of hydraulic and pneumatic cylinders for actuation of a shutter assembly in an optical system. In addition the techniques can apply to the flexible mounting of other mechanisms incorporating movable members having axes of symmetry, including push rods and rotating shafts.