Apparatus and method for simultaneously transferring a mask pattern to

Abstract

Disclosed is a double-side exposure apparatus having a substrate holder for holding a photosensitizable substrate; a first exposure system containing a first light source, a first illumination unit for striking a ray of light emitted from the first light source in a first mask, and a first projection optical unit for projecting an image of the first mask onto a front surface of the photosensitizable substrate; and a second exposure system, mounted at the side opposite to the first exposure system, containing a second light source, a second illumination unit for striking a ray of light emitted from the first light source in a second mask, and a second projection optical unit for projecting an image of the second mask onto a back surface of the photosensitizable substrate; wherein the pattern of the first mask is exposed to the front surface of the photosensitizable substrate and the pattern of the second mask is exposed to the back surface thereof substantially simultaneously with exposure of the pattern of the first mask to the front surface thereof. Also, further disclosed is an exposing method for exposure of both surfaces of a substrate with the double-side exposure apparatus having the structure as described above, which involves aligning a first mask for a first exposing surface of a substrate with a second mask for a second exposing surface of the substrate in a state that no the substrate is interposed between a first projection optical unit for projecting a pattern of the first mask to the first exposing surface of the substrate and a second projection optical unit for projecting a pattern of the second mask to the second exposing surface of the substrate.