The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 27, 1999

Filed:

Dec. 03, 1996
Applicant:
Inventors:

Nobuaki Sakai, Hachioji, JP;

Katsuhiro Matsuyama, Hachioji, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324750 ; 324754 ;
Abstract

A scanning probe microscope for measuring the electrical properties of the surface of a sample comprises a first sensor for detecting electrical information for the sample surface and outputting a first electrical signal corresponding thereto, the first sensor including an electrically conductive probe located near the surface of the sample, a second sensor for detecting the distance between the probe and the sample and outputting a second electrical signal corresponding thereto, an actuator for relatively moving the probe and the sample in a three-dimensional manner, a servo control mechanism for adjusting the distance between the probe and the sample to a desired value by servo control in accordance with the second electrical signal while the electrical information is being detected by the first sensor, and a processing unit for processing the first electrical signal.


Find Patent Forward Citations

Sakai, Nobuaki. (1999). Scanning probe microscope for measuring the electrical properties of the (U.S. Patent No. 5929643). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5929643

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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