The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Jun. 11, 1997
Masato Muraki, Inagi, JP;
Susumu Goto, Tama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
The position of an alignment mark is accurately detected independently of distortion of the sectional structure of the alignment mark or the coating state of a resist that covers the alignment mark. This invention provides a position detection apparatus for detecting the position of an alignment mark formed on an object using an electron beam, which has an element electron optical system array (3) for irradiating electron beams onto the object in a matrix, and a deflector (6) for deflecting the plurality of electron beams. The deflector (6) scans the plurality of electron beams on the alignment mark, a reflected electron detector (9) synthesizes and detects reflected electrons or secondary electrons from the alignment mark upon scanning, and the position of the alignment mark is determined on the basis of the displacement amount of the electron beams and the detection result.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile