The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 1999
Filed:
Mar. 17, 1998
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A method of manufacturing an electrostatic deflecting electrode unit for use in charged beam lithography apparatus comprises a first step of preparing a hollow cylindrical member made of metal, a second step of forming grooves of a predetermined width in a cylindrical member in the direction of radius thereof and along lines that equally divides the periphery of the cylindrical member into eight sections, a third step of attaching a ring-like member made of an insulating material to each of end surfaces of the cylindrical member which are opposed to each other in the direction of axis of the cylindrical member in such a way that bottom portions of the grooves are exposed, and a fourth step of dividing the cylindrical member into eight electrodes by extending the bottom portions of the grooves in the direction of radius of the cylindrical member to reach the hole of the cylindrical member with the ring-like members attached. The dimensional precision of the electrostatic deflecting electrode is determined by the precision of the cylindrical member. Thus, the deflecting electrode unit is easy to process and assemble with precision.