The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 1999
Filed:
Sep. 23, 1996
Alan D Dorundo, Boca Raton, FL (US);
Michael Gerard Lisanke, Boynton Beach, FL (US);
Huizong Lu, Coconut Creek, FL (US);
Richard J McCormick, Light House Point, FL (US);
Lanphuong Thi Pena, Fort Lauderdale, FL (US);
Eric V Schnetzer, Boynton Beach, FL (US);
Ali Reza Taheri, Boca Raton, FL (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Apparatus for inspecting the surface of a sample includes a wide scanning interferometer, which is used to locate defects, or anomalies in the surface, and a narrow scanning interferometer, which is used to develop profiles of individual defects found by the narrow scanning interferometer. The sample may be driven in rotation about an axis, while the interferometers are independently moved radially to the axis.