The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 1999
Filed:
Aug. 06, 1996
Applicant:
Inventors:
Tony D Flaim, St. James, MO (US);
Jim D Meador, Ballwin, MO (US);
Xie Shao, Rolla, MO (US);
Terry Lowell Brewer, Rolla, MO (US);
Assignee:
Brewer Science, Inc., Rolla, MO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03C / ; G03C / ; C08L / ; C08L / ;
U.S. Cl.
CPC ...
4302711 ; 430935 ; 430517 ; 430519 ; 430521 ; 522904 ; 523436 ; 525510 ; 525514 ; 525523 ; 525533 ;
Abstract
A method for making multilayer resist structures for microlithographic processing using a thermosetting anti-reflective coating is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.