The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1999
Filed:
Dec. 30, 1997
Yau-Kae Sheu, Hsinchu, TW;
United Semiconductor Corp., , TW;
Abstract
An antifuse structure for semiconductor programmable logic devices and the process of fabrication are described. The antifuse structure has its bottom electrically conductive layer featuring sharp corners formed by consumption of the polysilicon material into the sidewall in a thermal oxidation procedure. The sharp corners enhance the intensity of electric field established by a positive bias applied across the top and bottom conductive layers. The sharp corners do not enhance the electric field intensity when a negative bias is applied. This asymmetric conductivity assists in the reduction of the programming voltage as well as the increase of programming speed when the antifuse element is programmed.