The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 1999
Filed:
Jun. 20, 1997
John A Denner, Lynn, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
The disclosed pressure transducer assembly includes metallic body, a diaphragm, a metallic plate, an insulator, and a conductor. The body defines an interior cavity. The diaphragm is mounted in the body and divides the interior cavity into a first chamber and a second chamber. A portion of the diaphragm flexes in a first direction in response to a pressure in the first chamber being greater than a pressure in the second chamber, and that portion of the diaphragm flexes in a second direction opposite the first direction in response to the pressure in the second chamber being greater than the pressure in the first chamber. The metallic plate is fixed to the metallic body in one of the first and second chambers. The insulator is also disposed in that chamber and is fixed to the metallic plate. The conductor is disposed on the insulator. The diaphragm and the conductor are characterized by a capacitance. The capacitance is representative of a difference between the pressures in the first and second chambers.