The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 1999
Filed:
Mar. 31, 1997
Charles Curtis Burkhart, Vancouver, WA (US);
Bruce Laurence Colburn, Vancouver, WA (US);
SEH America, Inc., Vancouver, WA (US);
Abstract
A method is provided for stabilizing Czochralski (CZ) silicon melt by controlled oscillation of the crucible rotation during the stabilization period of the silicon melt to reduce the gas bubbles and unmelted polysilicon particles contained therein and thereby increase the yield and productivity of CZ silicon crystal production. The crucible rotation is controlled to follow an Oscillating Crucible Rotation (OCR) pattern or a saw tooth rotation pattern, which include rapid oscillations between a high rate of rotation and a low rate of rotation of the crucible during a period prior to the growth of the CZ crystal ingot.