The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 1999
Filed:
Jul. 25, 1997
Applicant:
Inventors:
Daniel R Trojan, Phoenix, AZ (US);
Lawrence L Lee, Mountain View, CA (US);
Assignee:
Obsidian Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B / ; B24B / ; F16C / ;
U.S. Cl.
CPC ...
451259 ; 451288 ; 451398 ; 384193 ; 384206 ;
Abstract
A low profile, low hysteresis force feedback gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. A load cell is placed directly above a contact pin of the gimbal system to provide a very accurate feedback measurement of the amount of downward load applied to a substrate during polishing.