The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1999
Filed:
Aug. 21, 1997
Jean Canteloup, Monthlery, FR;
Roland Kleim, Metz, FR;
Instruments, S.A., Paris, FR;
Abstract
Device and method for three-dimensional measurements and observation of a surface layer of a thin-film structure, comprising a monitoring unit 4 which includes a video camera 12, a wide-beam illumination source 14, a narrow-beam illumination source, 20, an operation and control unit and a table for horizontal movement. The device comprises a Wollaston prism 24 arranged on the optical path of the narrow light beam, in order to obtain two narrow light beams whose polarization states are linear and mutually orthogonal, a polarizer 27 arranged on the optical axis of the Wollaston prism 24 so that the reflected narrow light beam passes through it after its travel through the Wollaston prism 24, and a detection cell 28.