The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1999
Filed:
Sep. 01, 1993
Applicant:
Inventors:
Gregory M Jursich, Clarendon Hills, IL (US);
William A Von Drasek, Oak Forest, IL (US);
Assignee:
American Air Liquide, New York, NY (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
423219 ; 4232 / ; 372 59 ;
Abstract
A method for extending the gas lifetime of an excimer laser by removing CF.sub.4 impurity, which comprises: