The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1999
Filed:
May. 28, 1996
Katsuo Nishi, Nakano-Ku, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A support boat for objects-to-be-processed including a plurality of support shelves formed in multi-stages spaced from each other by a vertical pitch for mounting a plurality of objects-to-be-processed which are to be heat treated in a vertical heat treatment apparatus; and a plurality of support bars for interconnecting the support shelves vertically spaced from each other and holding the same, the support boat comprising a light shielding plate disposed above an uppermost one or below a lowermost one of the support shelves for blocking heat rays from a heater for heating, whereby abrupt heating of central parts of those of the objects-to-be-processed which are positioned near the top or the bottom of the support boat is suppressed, and all the objects-to-be-processed can have substantially the same heat history.