The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 1999
Filed:
Jul. 30, 1997
Applicant:
Inventor:
Yeow Meng Teo, Singapore, SG;
Assignee:
Chartered Semiconductor Manufacturing Ltd., Singapore, SG;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438632 ; 438637 ; 438646 ; 438672 ; 438675 ;
Abstract
An improved and new method for forming stacked polysilicon contacts for use in multilevel conducting interconnection wiring in semiconductor integrated circuits has been developed. The polysilicon contacts are self-aligned between wiring levels and the fabrication process results in a substantially planar top insulating layer surface.