The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 1999
Filed:
Dec. 04, 1996
Toshihiko Iijima, Yamanashi-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A wafer prober system includes a host computer, and a prober device. The prober device includes a plurality of prober circuits, and a plurality of touch screens, each connected to the prober circuit for simultaneously displaying image data and display data from said prober circuit, each of the prober circuit including an image processing section for sequentially photographing wafers checked by probes and outputting image data, a display control section for outputting display data according to the checking, and a prober control section for controlling the outputs of the image processing section and display control section. The control section outputs the image data and display data from the prober circuit, so that the image data and display data are displayed on the touch screen at the same time. Image data and display data are selectively provided by one of prober circuits, from image data and display data displayed on each of touch screens, and are simultaneously displayed on the host computer.