The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 1999
Filed:
Feb. 19, 1997
Yoshihiro Takahashi, Tokyo, JP;
Yasushi Yamamoto, Tokyo, JP;
Natsuhiko Sakairi, Tokyo, JP;
Shin-Ichi Shikata, Hyogo, JP;
Hideaki Nakahata, Hyogo, JP;
Kenjiro Higaki, Hyogo, JP;
Satoshi Fujii, Hyogo, JP;
Hiroyuki Kitabayashi, Hyogo, JP;
NEC Corporation, Tokyo, JP;
Sumitomo Electric Industries, Ltd., Osaka, JP;
Abstract
A surface acoustic wave device comprises a diamond layer (12) or a substrate (11) with a diamond layer (12) formed thereon, an Al electrode (13) formed on the diamond layer (12), and a ZnO piezoelectric thin film layer (14) formed on the diamond layer (12) with the Al electrode (13) covered by the ZnO piezoelectric thin film layer (14). The ZnO piezoelectric thin film layer (14) has a thickness h1 within a range defined by 0.65.ltoreq.kh1.ltoreq.0.75 while the Al electrode (13) has a thickness h2 within a range defined by 0.03.ltoreq.kh2.ltoreq.0.04, where k is given by k=2 .pi./.lambda. and .lambda. represents an electrode period.