Wafer carrier box

Abstract

A carrier box assembly for containing precision wafer materials in storage and transportation includes (a) an upwardly opening wafer cassette provided on inner surfaces of oppositely facing side walls thereof with sets of wafer-alignment grooves; (b) a box body for containing the wafer cassette and provided on the lower surface thereof with triangular standing props by which the box body can be placed on a horizontal surface with an inclination angle of 3 to 30 degrees; and (c) a covering mountable on the box body and coming into engagement with the box body by being moved in a direction parallel to the side walls of the box body. A wafer-pressing member of an elastic material is provided on the lower surface of the covering and has a set of wafer-receiving grooves formed on the lower surface thereof. By virtue of the coplanarity of the wafer materials held by the wafer-alignment grooves in an inclined disposition and the moving direction of the covering in mounting, the wafer materials resting in parallel on the downside walls of the inclined wafer-alignment grooves are kept safe from mechanical damages in packaging otherwise caused by the movement of the wafer-pressing member in a biased direction.