The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 1999
Filed:
Jul. 07, 1997
Applicant:
Inventors:
Darrin Malinowski, Boise, ID (US);
Dave Korn, Boise, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134172 ; 134184 ; 134199 ; 134902 ;
Abstract
A wafer processing apparatus is provided and includes a wafer carrier positioned in a processing vessel and arranged to support a plurality of wafers within the processing vessel such that the wafers define respective wafer gaps between adjacent wafers. A drive assembly is arranged to position respective processing plates in the respective wafer gaps such that respective major plate surfaces oppose respective major wafer surfaces. The processing plates are arranged to initiate a wafer processing operation.