The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1999
Filed:
May. 02, 1997
Tokyo Electron Limited, Tokyo, JP;
Abstract
A mechanism for stopping an object to be swung in a predetermined stop position and holding the object in that position includes a temporary stopping unit for stopping the swing of the object in a temporary stop position before the stop position, a rotation complementing unit for complementarily further rotating the object from the temporary stop position to the stop position, and a holding unit for holding the object in the stop position. As a preferable embodiment of the rotation complementing means, it is possible to use a) a coupling unit for coupling a mounting member to a second power transmission wheel such that the mounting member can freely rotate in both the forward and reverse directions with respect to the second power transmission wheel, b) a rotation angle regulating unit for regulating the angle range within which the mounting member can freely rotate in the forward and reverse directions with respect to the second power transmission wheel, c) a mounting member pre-rotating unit for allowing a driving unit to rotate the mounting member within the angle range prior to the second power transmission wheel, and driving the second power transmission wheel after the mounting member stops rotating due to the rotation angle regulating unit, and d) a complementary torque apply unit for applying a complementary torque to the object in the temporary stop position and complementarily further rotating the object from the temporary stop position to the stop position.