The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1999
Filed:
Jun. 26, 1996
Chien Chiang, Fremont, CA (US);
Chuanbin Pan, Santa Clara, CA (US);
Vicky M Ochoa, Pleasanton, CA (US);
Sychyi Fang, Palo Alto, CA (US);
David B Fraser, Danville, CA (US);
Joyce C Sum, Cupertino, CA (US);
Gary William Ray, Mountain View, CA (US);
Jeremy A Theil, Menlo Park, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
An interconnect system is provided. The interconnect system includes a silicon substrate and a first dielectric layer formed upon the silicon substrate. The interconnect system also includes a first level of at least two electrically conductive lines formed upon the first dielectric layer. The interconnect system further includes a region of low dielectric constant material formed between the at least two electrically conductive lines. The interconnect system also includes a first hard mask formed upon the polymer region.