The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 1999
Filed:
Oct. 15, 1996
Applicant:
Inventor:
Tatsuya Nishimura, Kanagawa-ken, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ; H01J / ; H01J / ;
U.S. Cl.
CPC ...
313 35 ; 313420 ; 313 40 ; 313 42 ;
Abstract
A method and apparatus for cooling window foils for extracting electron beams from a scanning type electron beam accelerator, the accelerator includes a primary window foil of double window type and a secondary window foil, the method and the apparatus are characterized by blowing cooling gasses against an electron beam scanning surface from both sides thereof to cool the primary window foil then reversing the flow of the cooling gasses at the center of the primary window foil, and circulating the cooling gasses by sucking the cooling gasses from both sides of the electron beam scanning surface to thereby simultaneously cool the secondary window foil.