The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1999
Filed:
Oct. 03, 1996
Applicant:
Inventor:
Kouichirou Tsujita, Hyogo-ken, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438636 ; 438792 ;
Abstract
Values of a real part n and an imaginary part k of the relation indicating a complex refractive index as an optical characteristic of an anti-reflection film are selected to be in the ranges of 1.0<n<3.0 and 0.4<k<1.3, respectively. The values of the real part and n and the imaginary part k of the complex refractive index are set in the above-described range by changing parameters of composition of a material of a plasma nitride film formed by a plasma CVD method. By this method, it is possible to easily select the anti-reflection film having an optimum optical characteristic without depending on experiments.