The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1999
Filed:
Nov. 29, 1996
Eric Liu, Hsinchu City, TW;
Abstract
A photoresist storage and supply device. The device includes a control unit for generating a number of on/off signals. A number of gas supply valves are open to let gas pass according to the on/off signals. A number of photoresist solution storage vessels store photoresist solution and receive the gas from a corresponding gas supply valve. A buffer vessel receives the photoresist solution, under pressure of the gas, from a selected photoresist solution storage vessel. A liquid level sensor mounted on the buffer vessel detects the solution level in the buffer vessel and generates a control signal when the photoresist solution level in the buffer vessel is below a certain threshold. A gas exhaust valve is coupled to the control unit, and expels gas from inside the buffer vessel according to an on/off signal.