The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 1999
Filed:
Mar. 31, 1997
Applicant:
Inventor:
Eric C Shurtliff, Phoenix, AZ (US);
Assignee:
SpeedFam Corporation, Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ;
U.S. Cl.
CPC ...
15102 ; 15 971 ; 1523016 ; 152441 ;
Abstract
An apparatus for cleaning workpieces such as magnetic recording discs, optical discs, and semiconductor wafers includes a sponge-like material surrounded on two sides by substantially rigid plates that serve as an exoskeleton support for the sponge-like material. The plates include a number of apertures formed therein. The sponge-like material protrudes through the apertures of the plates, allowing the sponge-like material to contract a surface of the workpiece during the cleaning process.