The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 1999
Filed:
May. 05, 1997
Koichiro Narimatsu, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A registration accuracy measurement mark has a first measurement mark, a second measurement mark, and a third measurement mark arranged in different layers in a layered manner. The first measurement mark includes a first sidewall and a second sidewall in parallel along a Y direction. The second measurement mark includes a third sidewall and a fourth sidewall in parallel along an X direction. The third measurement mark includes a fifth sidewall and a sixth sidewall in parallel along the X direction, and a seventh sidewall and an eighth sidewall in parallel along the Y direction. Registration accuracy measurement in both the X and Y directions can be carried out at the same time even when the measurement of registration accuracy in the X and Y directions respectively is directed to different layers.