The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1999
Filed:
Sep. 29, 1995
Applicant:
Inventors:
Curtis Tsai, Beaverton, OR (US);
Kenneth K O, Gainesville, FL (US);
Brad W Scharf, Winchester, MA (US);
Assignee:
Analog Devices, Incorporated, Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438366 ; 438368 ; 438309 ;
Abstract
Emitter widths of 0.3 .mu.m on double polysilicon bipolar transistors are achieved using O.8 .mu.m photolithography and a double spacer process. The emitter width reduction is confirmed with structural and electrical measurements. The double-spacer device exhibits superior low current f.sub.T and f.sub.max.