The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 1998
Filed:
Mar. 26, 1996
Masahiro Hatakeyama, Fujisawa, JP;
Katsunori Ichiki, Fujisawa, JP;
Takao Kato, Tokyo, JP;
Masaaki Kajiyama, Yokohama, JP;
Takashi Tsuzuki, Tokyo, JP;
Yotaro Hatamura, Bunkyo-ku, Tokyo, JP;
Masayuki Nakao, Matsudo, JP;
Ebara Corporation, Tokyo, JP;
Other;
Abstract
A micro-working apparatus performs fabrication and assembly tasks for micron/nanometer sized objects while progress of operations is observed in real-time by at least a pair of optical or electron microscopes to provide simultaneous views from at least two directions. This offers spatial visual information regarding the working space which is particularly critical in micro-working. Micro-working is further facilitated by the use of a micro-pallet device specially designed for use in the apparatus, but also offering other application possibilities. Rotational and parallel translation movements provided by the micro-pallet combined with the micro-working capability of the apparatus are utilized to enable production of micron-sized parts for use in advanced applications of optical and electronic devices.