The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 1998
Filed:
Aug. 29, 1995
Applicant:
Inventors:
Tetsuzo Mori, Atsugi, JP;
Koichi Sentoku, Utsunomiya, JP;
Takahiro Matsumoto, Utsunomiya, JP;
Noriyasu Hasegawa, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
36457102 ; 36457101 ; 341123 ;
Abstract
A method of measuring information related to an object, includes the steps of measuring a change of a measurement error with respect to time, and determining the frequency of measurements for measuring the measurement error, to be done during a measurement period, on the basis of the change in measurement error. Then, in the measurement period, a measured value is corrected by using a latest measurement error.