The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 1998
Filed:
Jul. 10, 1997
Bryan Mitchell Tracy, Oakland, CA (US);
Donald L Wollesen, Saratoga, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method for navigating directly to defects on a blank wafer caused by particles dropped from process tools. A blank wafer is marked with fiducial marks, the number of initial defects on the blank wafer is determined and the position coordinates of the initial defects and the fiducial marks are recorded. The blank wafer is placed into a selected process tool and the additional defects that are caused by particles dropped from the process tool are detected in an inspection tool and their position coordinates are determined and recorded as well as the position coordinates of the fiducial marks. The blank wafer is then placed in an analysis tool that is able to navigate directly to each of the additional defects at a high magnification using the position coordinates of the fiducial marks.