The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 1998

Filed:

Apr. 22, 1997
Applicant:
Inventors:

Chung-Chien Lu, Hsinchu, TW;

Eric Liu, Hsinchu, TW;

His-Huang Lee, Hsinchu, TW;

Tien-Tsai Lu, Hsinch Hsien, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G08B / ;
U.S. Cl.
CPC ...
340603 ; 340661 ; 340686 ; 417-1 ; 417 63 ; 417 447 ; 417279 ; 222-1 ; 137-2 ; 137 152 ; 73861 ; 3644791 ;
Abstract

A monitoring device for a chemical reagent supply system includes a position voltage generator, mounted to a pump of the supply system, to monitor the expansion state of a bellows. The actual outflow of the chemical reagent is calculated by the position voltage generator. According to a demand signal from equipment needing the chemical reagent, which is processed to consider the viscosity of the chemical reagent, a theoretic demand outflow is calculated by the monitoring device. When the difference between the actual outflow and the theoretic demand outflow exceeds a permissible tolerance, the monitoring device raises an alarm signal to warn an operator and thereby to assure the accuracy of the chemical reagent supply system.


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