The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 1998
Filed:
May. 21, 1996
Applicant:
Inventors:
Suryadevara V Babu, Potsdam, NY (US);
Cancheepuram V Srividya, Potsdam, NY (US);
Assignee:
Teledyne Industries Incorporated, Los Angeles, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
428408 ; 257 77 ; 428457 ; 428446 ;
Abstract
A method is described for forming a corrosion resistant electrical component comprising exposing an electrical component to a first atmosphere containing silicon ions to coat the electrical component with a polysilicon film; and exposing the polysilicon coated component to a second atmosphere containing carbon ions generated from a gaseous mixture comprising a carbon source gas to encapsulate the polysilicon coated electrical component with a diamond-like carbon coating, the carbon source gas having a carbon to hydrogen atom ratio of between about 1:1 and 1:2.