The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 1998
Filed:
Nov. 18, 1996
Applicant:
Inventors:
Yosi Shacham-Diamand, Ithaca, NY (US);
Valery M Dubin, Cupertino, CA (US);
Chiu H Ting, Saratoga, CA (US);
Bin Zhao, Irvine, CA (US);
Prahalad K Vasudev, Austin, TX (US);
Assignees:
Cornell Research Foundation, Ithaca, NY (US);
Sematech, Inc., Austin, TX (US);
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
438678 ; 438908 ; 438913 ;
Abstract
An electroless deposition apparatus and a method of electroless deposition that uses a single process chamber for performing multiple processes by moving through the process chamber a variety of fluids one at a time in a sequential order.