The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 1998
Filed:
May. 28, 1996
Hongyong Zhang, Kanagawa, JP;
Hideki Uochi, Kanagawa, JP;
Shunpei Yamazaki, Tokyo, JP;
Yasuhiko Takemura, Kanagawa, JP;
Minoru Miyazaki, Kanagawa, JP;
Akane Murakami, Kanagawa, JP;
Toshimitsu Konuma, Kanagawa, JP;
Akira Sugawara, Kanagawa, JP;
Yukiko Uehara, Kanagawa, JP;
Semiconductor Energy Laboratory Co., Ltd., Kanagawa, JP;
Abstract
A process for fabricating an electronic circuit by oxidizing the surroundings of a metallic interconnection such as of aluminum, tantalum, and titanium, wherein anodic oxidation is effected at a temperature not higher than room temperature, preferably, at 10.degree. C. or lower, and more preferably, at 0.degree. C. or lower. The surface oxidation rate of a metallic interconnection can be maintained constant to provide a surface free of irregularities.