The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 1998
Filed:
Dec. 21, 1994
Masayuki Nishiwaki, Kawasaki, JP;
Hiroshi Sugitani, Machida, JP;
Tsuyoshi Orikasa, Musashimurayama, JP;
Akira Goto, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An illumination optical system includes a beam dividing device for dividing a radiation beam into plural illumination beams, and an optical arrangement for superposing the illumination beams one upon another on a surface to be illuminated, the optical arrangement having different focal distances in substantially orthogonal first and second directions, and the optical arrangement being adapted to focus each of the illumination beams on the surface in the first direction while defocusing the same in the second direction, whereby a linear illumination region is defined on the surface.