The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 1998
Filed:
Jul. 07, 1995
Applicant:
Inventors:
Chen-Chiu Hsue, Hsin-chu, TW;
Edward Houn, Tainan, TW;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23L / ; H01L / ;
U.S. Cl.
CPC ...
219390 ; 118725 ; 427255 ;
Abstract
A furnace with a large quartz tube with a gas inlet on one end, and a large opening at the other end for introducing and withdrawn wafers on a support. At least one small quartz tube is provided within and adjacent the sidewall of the large tube that has a gas inlet on one end outside of the large tube, and apertures in the sidewall. In use, a major stream of gas is provided by a gas inlet on the large tube that flows longitudinally through the large tube. A series of secondary streams of gas are provided from the apertures in the small tube that flow perpendicular to the major stream and across the surfaces of the wafers.