The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 1998
Filed:
Jun. 25, 1997
Kiyoshi Ikemoto, Ayase, JP;
Speedfam Co., Ltd., , JP;
Abstract
A disk cleaning and drying apparatus is capable of cleaning and drying a great number of disks per unit time to a substantially complete or satisfactory extent without increasing the overall size thereof. A cleaning unit has a first index table with a plurality of first holders for holding disks to be cleaned, a plurality of cleaning elements provided on the first index table for cleaning the disks, and a first drive device for driving the first index table to rotate at a first predetermined angle of rotation to thereby move disks held by the plurality of holders to the cleaning elements. A drying unit has a second index table with a plurality of second holders for holding disks to be dried, a plurality of drying members provided on the second index table for drying the disks, and a second drive device for driving the second index table to rotate at a second predetermined angle of rotation. A conveyor unit is adapted to reciprocate for conveying disks to be cleaned from a first point to a second point at which the disks thus conveyed are delivered to and held by one of the first holders just positioned at the second point. The conveyor takes disks which have been cleaned by the cleaning unit out of one of the first holders positioned at the second point and convey them to the third point at which the disks thus conveyed are delivered to and held by one of the second holders just positioned at the third point, the conveying means being further operable to take disks which have been dried by the drying unit out of one of the second holders of the second index table positioned at the third point and convey them to the fourth point.