The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 1998
Filed:
Jun. 20, 1996
Iwao Kumasaka, Aiko-gun, JP;
Kazuhiko Usui, Yokohama, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
The invention relates to a teaching method for instructing relative proximity locations to a loading arm that is used for loading objects to be processed in to or out of a support boat, the support boat being provided with a plurality of support portions for supporting the objects to be processed at a predetermined pitch along the length thereof. With this teaching method the loading arm is moved manually into the vicinity of one of the plurality of support portions that is positioned at an uppermost end of the support boat, a support portion positioned at a lowermost end thereof, and at least one support portion other than the two support portions; obtaining three-dimensional coordinates thereof; and these three-dimensional coordinates are stored in a storage portion. The three-dimensional coordinates for each of the others of the support portions are then derived on the basis of these stored values. This makes it possible to accurately derive the three-dimensional coordinates of all of the support portions in practice, even at locations where the boat itself has become deformed.