The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 1998
Filed:
Jun. 26, 1996
Applicant:
Inventor:
Steven Douglas Golladay, Hopewell Junction, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2503 / ; 250398 ; 2504922 ;
Abstract
An charged particle beam imaging system reduces aberrations affecting resolution at the workpiece where the aberrations are caused by interactions between the charged particles in the beam. The average distance between the particles at a crossover image in the illumination subsystem is increased by positioning an annular aperture at the crossover image.